Optical vortex metrology for nanometric speckle displacement measurement

Wholefiled Optical Metrology: Surface Displacement Measurement Wholefield Optical Metrology: Surface Displacement Measurement

High resolution displacement detection by speckle pattern analysis : accuracy limits in linear displacement speckle metrology

We propose a simple reflection measurement setup and a motion evaluation procedure based on a two dimensional recording of subsequent speckle images. The averaging of cross correlation functions is used to measure displacements. We demonstrate experimentally a 10 nm precision on a 50 μm measurement range limited by systematical errors. An image library is proposed to extend the measurement rang...

Ocular microtremor measurement using laser-speckle metrology.

We describe a novel, noninvasive measurement approach for recording a small involuntary tremor of the eye known as ocular microtremor. The method is based on measuring out-of-plane angular displacements of a target by using laser-speckle correlation of images recorded in the Fourier plane of a lens. The system has a dynamic range of 4 to 5000 μrad, resolution of 4 μrad, and a bandwidth of 250 H...

Speckle Metrology

5.1.1 Vibration Detection in the Presence of a Reference Wave 5.1.2 Vibration Detection without a Reference Field 5.2 Deformation Measurement by Speckle Interferometry 5.3 In-Plane Oscillations by Image Plane Recording 5.3.1 Theory 5.3.2 Time-Average Exposures of in-Plane Oscillations 5.3.3 Display of Young's Fringes 5.3.4 Comparison of Fringe Shapes for Different Motions 5.4 Tilt Analysis by F...

Three-Dimensional Continuous Displacement Measurement with Temporal Speckle Pattern Interferometry

A speckle interferometer which can measure whole field three-dimensional displacements continuously and dynamically has been built. Three different wavelength lasers are used to produce the speckle interferograms of the two in-plane displacements (displacements in the x- and y-direction) and one out-of-plane displacement (displacement in the z-direction), respectively. One color CCD camera is e...